Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process

作者: Cai, Chunhua; Tan, Junyan; Hua, Di; 等.

SCIENTIFIC REPORTS 卷: 8 文献号: 17065 出版年: NOV 20 2018

Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications

作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 卷: 27 期: 4 页: 739-747 出版年: AUG 2018

A 2D Wind Sensor Using the Delta P Thermal Feedback Control

作者: Wang, Shang; Yi, Zhenxiang; Qin, Ming; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 卷: 27 期: 3 页: 377-379 出版年: JUN 2018

EIGHT-TRIGRAM-INSPIRED MEMS THERMAL WIND SENSOR WITH IMPROVED ACCURACY

作者: Ye, Yizhou; Yi, Zhenxiang; Qin, Ming; 等.

会议: 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 会议地点: Belfast, NORTH IRELAND 会议日期: JAN 21-25, 2018
会议赞助商: IEEE

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   丛书: Proceedings IEEE Micro Electro Mechanical Systems 页: 836-839 出版年: 2018

Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors

作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

IEEE SENSORS JOURNAL 卷: 17 期: 24 页: 8324-8331 出版年: DEC 15 2017

Modelling and characterization of a robust, low-power and wide-range thermal wind sensor

作者: Zhu, Yanqing; Qin, Ming; Ye, Yizhou; 等.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 卷: 23 期: 12 页: 5571-5585 出版年: DEC 2017

DRIE Trenches and Full-Bridges for Improving Sensitivity of 2-D Micromachined Silicon Thermal Wind Sensor

作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 卷: 26 期: 5 页: 1073-1081 出版年: OCT 2017

Experiment of the MEMS Wind Sensor Based on Temperature-Balanced Mode

作者: Yi, Zhenxiang; Qin, Ming; Huang, Qing-An

IEEE SENSORS JOURNAL 卷: 17 期: 8 页: 2316-2317 出版年: APR 15 2017

DRIE TRENCHES AND FULL-BRIDGES DESIGN FOR SENSITIVITY IMPROVEMENT OF MEMS SILICON THERMAL WIND SENSOR

作者: Ye, Yizhou; Yi, Zhenxiang; Qin, Ming; 等.

会议: 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 会议地点: Las Vegas, NV 会议日期: JAN 22-26, 2017
会议赞助商: IEEE

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)   丛书: Proceedings IEEE Micro Electro Mechanical Systems 页: 985-988 出版年: 2017

Sensitivity Improvement of a 2D MEMS Thermal Wind Sensor for Low-Power Applications

作者: Zhu, Yanqing; Qin, Ming; Huang, Jianqiu; 等.

IEEE SENSORS JOURNAL 卷: 16 期: 11 特刊: SI 页: 论文、成果、著作等

Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process

作者: Cai, Chunhua; Tan, Junyan; Hua, Di; 等.

SCIENTIFIC REPORTS 卷: 8 文献号: 17065 出版年: NOV 20 2018

  

Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications

作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 卷: 27 期: 4 页: 739-747 出版年: AUG 2018

  

A 2D Wind Sensor Using the Delta P Thermal Feedback Control

作者: Wang, Shang; Yi, Zhenxiang; Qin, Ming; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 卷: 27 期: 3 页: 377-379 出版年: JUN 2018

  

EIGHT-TRIGRAM-INSPIRED MEMS THERMAL WIND SENSOR WITH IMPROVED ACCURACY

作者: Ye, Yizhou; Yi, Zhenxiang; Qin, Ming; 等.

会议: 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 会议地点: Belfast, NORTH IRELAND 会议日期: JAN 21-25, 2018
会议赞助商: IEEE

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   丛书: Proceedings IEEE Micro Electro Mechanical Systems 页: 836-839 出版年: 2018

  

Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors

作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

IEEE SENSORS JOURNAL 卷: 17 期: 24 页: 8324-8331 出版年: DEC 15 2017

  

Modelling and characterization of a robust, low-power and wide-range thermal wind sensor

作者: Zhu, Yanqing; Qin, Ming; Ye, Yizhou; 等.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 卷: 23 期: 12 页: 5571-5585 出版年: DEC 2017

  

DRIE Trenches and Full-Bridges for Improving Sensitivity of 2-D Micromachined Silicon Thermal Wind Sensor

作者: Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; 等.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 卷: 26 期: 5 页: 1073-1081 出版年: OCT 2017

  

Experiment of the MEMS Wind Sensor Based on Temperature-Balanced Mode

作者: Yi, Zhenxiang; Qin, Ming; Huang, Qing-An

IEEE SENSORS JOURNAL 卷: 17 期: 8 页: 2316-2317 出版年: APR 15 2017

  

DRIE TRENCHES AND FULL-BRIDGES DESIGN FOR SENSITIVITY IMPROVEMENT OF MEMS SILICON THERMAL WIND SENSOR

作者: Ye, Yizhou; Yi, Zhenxiang; Qin, Ming; 等.

会议: 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 会议地点: Las Vegas, NV 会议日期: JAN 22-26, 2017
会议赞助商: IEEE

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)   丛书: Proceedings IEEE Micro Electro Mechanical Systems 页: 985-988 出版年: 2017

  

Sensitivity Improvement of a 2D MEMS Thermal Wind Sensor for Low-Power Applications

作者: Zhu, Yanqing; Qin, Ming; Huang, Jianqiu; 等.

IEEE SENSORS JOURNAL 卷: 16 期: 11 特刊: SI 页专利、著作版权等

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