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王旭迪

领域:高端装备制造产业 学校:合肥工业大学职称:教授

1、微纳制造技术与应用:面向信息、显示和新能源器件应用,研究大面积微纳结构复制转移的关键理论、技术及其方法。
2、真空检测与计量技术:纳流控通道等新型超高真空计 量器具的可控制作技术及其表征、压强动态测试新原理、漏率测试方法及其系统等...

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教育背景

工作经历

项目课题经历

论文、成果、著作等

 主持或完成国家自然基金面上项目、国防基础科研重大项目、科技部863项目等十余项,参加国家重大专项、欧共体、英国EPSRC项目等五项。近年来指导研究生四人次获得中国真空学会优秀硕士生奖学金,八人次获得研究生国家奖学金。在J. Mater. Chem. MicroelectEngJ. Vac. Sci. Tech. A&BVacuum等国内外著名学术期刊发表论文30 余篇,授权发明专利十余项。

国家自然科学基金面上项目:广域克努增数下纳流控通道型流导元件气体传输多重机理   (No.61871172) 2019-2022

国家02专项(极大模集成路制造技及成套工)项目:气体高灵敏度检测技术

国家自然科学基金面上项目:聚合物纳流控通道的溶剂蒸发辅助自封闭机理研究(No.61574053) 2016-2019

国防技术基础科研重大项目:气体微流量测量技术 2017-2019

深空探测专项项目:发射及再入过程中航天器内部压力变化仿真及控制分析 2017-2018

航天CAST基金项目:空间站舱外管道泄漏在轨监测技术研究 2017-2018

电子集团标志性技术项目:漏率测试新方法研究 2016-2017

航天CAST基金项目:特种真空检漏装置内气体分子的空间输运特性研究 2016-2017

•863探索导向类项目(No.2008AA04Z303):基于紫外压印技术的自支撑SU-8胶纳米流体系统 2008-2011

                                                

部分论文:

• Biao Jiang, Xudi Wang* et al, New leak element using 1Dnanofluidic channels and indium sealing, Vacuum 156 (2018) 55–58

• Benmeng Wei, Xudi Wang* et al, Fabrication ofconductance-controllable standard leak elements on anodic aluminum oxide usinga selective coating method. J. Vac. Sci. Technol. B, 35(4): 040601(2017)

• Aiqing Zhu, Xudi Wang* et al, New leak assembly basedon fluidic nanochannels, J. Vac. Sci. Technol. A 34, 050604 (2016)

Yongheng Zhao, Yongjun Cheng, Xudi Wang*, New leakelement using anodic aluminum oxide, Vacuum 131 (2016) 111-114

Zheng, Dingjie, Dong, Dong, Wang, Xudi*, Nanopatterningusing a simple bilayer lift-off process by transfer printing based onpoly(dimethylsiloxane) templates, Micro and Nano Letters, 2015(11), p 633- 636

•Dong Dong, Wei Wei, Dan Yang, Xudi Wang*, Helium gaspermeability measurements of polymeric membranes using the difference method,Vacuum 121 (2015) 173-176

•Li, Xiaojun,Wang, Xudi*, et al, Fabrication ofsize-controllable nanofluidic channels using angled physical vapor deposition,Microelectronic Engineering, 2012, 98:647-650

•Zhang, Yuping,Wang, Xudi, et al, Aligned ultralongnanowire arrays and their application in flexible photodetector devices,Journal of Materials Chemistry, 2012, 22(29):14357-14362

•Xiaojun Li,Yong Chen,Keqiang Qiu*, Xudi Wang*, Multiplecentimetre-long fluidic-channels with smooth and vertical sidewall fabricatedby novel NIL mould and thermal bonding,Microelectronic Engineering,2012,98(10):720-724

• X. Wang, J. Jin, X. Li et al, Low-pressure thermalbonding, Microelectron Eng. 88 (2011) 2427–2430

• X. Li, X.Wang*, et al, Fabrication of micro/nanofluidic system combining hybrid mask-mould lithography with thermal bonding, MicroelectronEng 87(2010), 722-725

• X. Wang, L. Ge, J. Lu, S. Fu, Z Cui. Fabrication ofEnclosed Nanofluidic channels by UV cured imprinting and thermal bonding ofSU-8 Photoresist. Microelectron Eng. 86(2009), 1347-1349

• X. Wang, Yifang Chen, Ling Wang and Zheng Cui.Fabrication of nanoimprint template in Si with high etch rate by non-switchDRIE process. Microelectron Eng. 85(2008), 1015-1017

• X. Wang, Y. Chen, S. Fu, Z Cui. Free-standing SU-8subwavelength gratings fabricated by UV curing imprint. Microelectron Eng.85(2008), 910-913

• X. wang, Y. liu,X. Xu, S. Fu, Z Cui. Reactive ion beametching of HfO2film and removal of sidewall redeposition. J. Vac. Sci. Technol. A ,24(4): 1067-1072 JUL-AUG 2006

• X Wang, Y. Chen, S. Fu, Z Cui. High density patternsfabricated in SU-8 by UV curing nanoimprint; Microelectron Eng., 84(2007),872-876

• Z Cui, X. Wang, Y Li, G Y Tian, High sensitivemagnetically actuated micromirrors for magnetic field measurement. Sensors andActuators A 138 (2007) 145–150

 

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