2004.9 2007.6 河北师范大学 材料物理与化学 硕士 2007.9 2010.6 大连理工大学 等离子体物理 博士 2000.9 2001.6 河北师范大学 物理学 学士

2013.1 至今 大连理工大学 2010.8 2012.12 比利时安特卫普大学 博士后

完成国家青年自然科学基金一项和企业项目研发横向合同一项

论文发表详细情况： [1]Shu-Xia Zhao, Fei Gao, Ya-Ping Wang, You-Nian Wang and Annemie Bogaerts, "Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma", J. Appl. Phys., 118(3), 033301 (2015) [2]Shu-Xia Zhao, Yu-Ru Zhang, Fei Gao, You-Nian Wang and Annemie Bogaerts, "Bulk plasma fragmentation in C4F8 inductively coupled plasma: a hybrid modeling study", J. Appl. Phys., 117(24), 243303 (2015) [3]Shu-Xia Zhao, Fei Gao, You-Nian Wang and Annemie Bogaerts, "Gas ratio effects on the Si etch rate and profile uniformity in an Ar/CF4 inductively coupled plasma", Plasma Sources Sci. Technol. 22, 015017 (2013) [4]Shu-Xia Zhao, Fei Gao, You-Nian Wang and Annemie Bogaerts, "The effects of F2 attachment by low-energy electrons on the electron behavior in an Ar/CF4 inductively coupled plasma", Plasma Sources Sci. Technol. 21, 025008 (2012). [5]Shu-Xia Zhao, and You-Nian Wang, "Investigation of the effect of metastable atoms on mode transition in argon inductive discharge via a hybrid model ", J. Phys. D: Appl. Phys. 43, 275203 (2010). [6]Shu-Xia Zhao, Fei Gao and You-Nian Wang, "Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model", J. Phys. D: Appl. Phys. 42, 225203 (2009). [7]Shu-Xia Zhao, Xiang Xu, Xue-Chun Li and You-Nian Wang, "Fluid simulation of the E-H mode transition in inductively coupled plasma", J. Appl. Phys. 105, 083306 (2009) [8]赵书霞，张连珠，“氮气辉光放电等离子体过程的PIC/MCC模拟”，核聚变与等离子体物理，29, 39-43 (2009) [9]Hui-Jing Xu,Shu-Xia Zhao, Yu-Ru Zhang, Fei Gao, Xue-Chun Li, You-Nian Wang, "Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas",Phys. Plasma, 22, 043508, (2015) [10]Hui-Jing Xu, Shu-Xia Zhao, Fei Gao, Yu-Ru Zhang, Xue-Chun Li, You-Nian Wang, "Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model", Chin. Phys. B, 24(11), 115201,(2015) [11]Wei Liu, Fei Gao, Shu-Xia Zhao, Xue-Chun Li, and You-Nian Wang, "Mode transitioin in CF4+Ar inductively coupled plasma", Phys. Plasmas, 20, 123513 (2013) [12]Lian-Zhu Zhang, Shu-Xia Zhao, Xiu-Lan Meng, “Characterization of nitrogen glow discharge plasma via optical emission spectrum simulation”, Plasma Sci. and Tech., 10, 455 (2008) [13]Fei Gao, Shu-Xia Zhao, Xiao-Song Li and You-Nian Wang, "Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma ", Phys. Plasmas 17, 103507 (2010). [14]Fei Gao, Shu-Xia Zhao and You-Nian Wang, "Comparison between experiment and simulation for Ar inductively coupled plasma", Phys. Plasmas 16, 113502, (2009). [15]Xue-Jiao Si, Shu-Xia Zhao, Xiang Xu, Annemie Bogaerts and You-Nian Wang, "Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma", Phys. Plasmas, 18, 033504 (2011) [16]Wei Yang, Shu-Xia Zhao, De-Qi Wen, Wei Liu, Yong-Xin Liu, Xue-Chun Li, and You-Nian Wang, "F-atoms kinetics in SF6/Ar inductively coupled plasma", J. Vac. Sci. Technol. A, 34(3), 031305 (2016) [17]Wei, Liu, De-Qi Wen, Shu-Xia Zhao, Fei Gao, and You-Nian Wang, "Characterization of O2 /Ar inductively coupled plasma studied by using a Langmuir probe and global model', Plasma Sources Sci. Technol. 24, 025035 (2015) [18]Xi-Feng Wang, Yuan-Hong Song, Shu-Xia Zhao, Zhong-Ling Dai, and You-Nian Wang, "Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge", Plasma Sci. Technol., 18(1), 1 (2016) [19]Yu-Ru Zhang, Xiang Xu, Shu-Xia Zhao, Annemie Bogaerts, and You-Nian Wang, "Comparison of electrostatic and electromagnetic simulations for very high frequency plasma", Phys. Plasmas, 17, 113512 (2010) [20]Quan-Zhi Zhang, Shu-Xia Zhao, Wei Jiang, and You-Nian Wang, "Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas", J. Phys. D: Appl. Phys., 45, 305203 (2012) [21]Wei Jiang, Hong-Yu Wang, Shu-Xia Zhao, and You-Nian Wang, "Hysteresis induced by gap length effects in CCP at low pressure", J. Phys. D: Appl. Phys., 42, 102005 (2009) [22]Liang Yang, Hui-Jie Yan, Xiao-Hua Qi, Shu-Xia Zhao, and Chun-Sheng Ren, "Geometry Effects of SDBD Actuator on Atmospheric-Pressure Discharge Plasma Airflow Acceleration", IEEE Trans. Plasma Sci., 43(10), 3653 (2015) [23]Fei Gao, Xue-Chun Li, Shu-Xia Zhao, and You-Nian Wang, "Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition", Chin. Phys. B, 21(7), 075203 (2012)