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刘世元

领域:高端装备制造产业 学校:华中科技大学职称:教授

1.面向集成电路IC制造的纳米测量技术与装备面向集成电路(IC)、发光二极管(LED)、有机显示(OLED)、光伏太阳能(PV)、柔性电子制造中的工艺控制和良率管理,研究纳米薄膜、纳米结构关键尺寸(CD)、套刻误差等三维形貌测量新原理,探索纳米颗粒、刮伤、断线、桥接等纳米缺陷检测新方法,解决IC制造纳米测量装备与缺陷检测装备中的“卡脖子”技术难题。2.新型椭偏仪研制与半导体光电材料表征测量研制穆勒矩阵椭偏仪、成像椭偏仪、层析椭偏仪、红外椭偏仪、太赫兹椭偏仪、超快椭偏仪、高速斯托克斯偏振仪、片上型椭偏仪等新型椭偏仪器,实现石墨烯、过渡金属硫族化合物、黑磷、硅烯等新型二维材料,以及IC、LED、OLED、PV、柔性电子等新型半导体光电材料的电学、光学、力学、动力学等物理特性表征测量。3.薄膜光电器件与新型偏振器件建模计算及优化设计  面向多层纳米薄膜与纳米结构的有机发光显示、柔性显示、有机光伏、钙钛矿太阳能电池等薄膜光电器件,发展高效鲁棒的光学建模计算与优化设计方法,提升器件的光学耦合效率和能量转化效率。采用新型双折射、手性、各向异性材料,引入超材料、超表面等纳米结构,优化设计并研制新型偏振器件。 ...

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教育背景

工作经历

项目课题经历

论文、成果、著作等

承担的科研项目:
1. 国家自然科学基金重大科研仪器研制项目,51727809,高分辨层析成像穆勒矩阵椭偏仪研制与应用基础研究,2018-2022,701万元,在研,主持。
2. 国家科技重大专项子课题,2017ZX02101006-004,套刻误差光学测量技术研究,2017-2020,742万元,在研,主持。
3. 国家杰出青年科学基金,51525502,机械测试理论、方法与技术,2016-2020,400万元,在研,主持。
4. 国家自然科学基金面上项目,51475191,基于散射场层析广义椭偏仪的三维纳米结构测量理论与方法,2015-2018,85万元,已结题,主持。
5. 湖北省自然科学基金创新群体项目,2015CFA005,纳米光学测量技术与仪器创新群体,2015-2017,60万元,已结题,主持。
6. 国家科技重大专项子课题,2012ZX02701001-004,基于模型的光学临近校正技术研究,2012-2014,135万元,已结题,主持。
7. 国家重大科学仪器设备开发专项,2011YQ160002,宽光谱广义椭偏仪设备开发,2011-2014,3979万元,已结题,主持。
8. 国家自然科学基金重大研究计划培育项目,91023032,基于广义椭偏仪的纳米结构三维形貌参数测量理论与方法研究,2011-2013,50万元,已结题,主持。
9. 国家自然科学基金面上项目,50775090,高深宽比微纳层次结构的仿壁虎毛参数优化设计与制作工艺研究,2008-2010,34万元,已结题,主持。
10. 教育部新世纪优秀人才支持计划,NCET-06-0639,MEMS结构实验模态分析理论与方法,2007-2009,50万元,已结题,主持。
11. 国家863计划项目,2006AA04Z325,高深宽比微纳深沟槽结构基于模型的红外反射谱测量方法与设备,2006-2008,69万元,已结题,主持。

荣誉与奖励:

国家杰出青年科学基金获得者
国家“万人计划”科技创新领军人才
湖北省自然科学基金创新群体负责人
教育部新世纪优秀人才
华中科技大学十佳青年教工
日内瓦国际发明金奖

近期学术论文:
1.   B. Song, H. Gu, M. Fang, X. Chen, H. Jiang, R. Wang, T. Zhai, Y. Ho, and S. Liu, "Layer-dependent dielectric function of wafer-scale 2D MoS2," Adv. Opt. Mater. 7, 1801250 (2019).
2.   H. Gu, B. Song, M. Fang, Y. Hong, X. Chen, H. Jiang, W. Ren, and S. Liu, "Layer-dependent dielectric and optical properties of centimeter-scale 2D WSe2: evolution from a single layer to few layers," Nanoscale, doi: 10.1039/c9nr04270a (2019).
3.   B. Song, H. Gu, M. Fang, Y.-T. Ho, X. Chen, H. Jiang, and S. Liu, "Complex optical conductivity of 2D MoS2: a striking layer-dependency," J. Phys. Chem. Lett., doi: 10.1021/acs.jpclett.9b02111 (2019).
4.   H. Gu, X. Chen, H. Jiang, Y. Shi, and S. Liu, "Wide field-of-view angle linear retarder with ultra-flat retardance response," Opt. Lett. 44, 3026-3029 (2019).
5.   X. Ke, H. Gu, X. Zhao, X. Chen, Y. Shi, C. Zhang, H. Jiang, and S. Liu, "Simulation method for study on outcoupling characteristics of stratified anisotropic OLEDs," Opt. Express 27, A1014-A1029 (2019).
6.   H. Jiang, H. Peng, G. Chen, H. Gu, X. Chen, Y. Liao, S. Liu, and X. Xie, "Nondestructive investigation on the nanocomposite ordering upon holography using Mueller matrix ellipsometry," Eur. Polym. J. 110, 123-129 (2019).
7.   X. Chen, J. Liao, H. Gu, Y. Shi, H. Jiang, and S. Liu, "Proof of principle of an optical Stokes absolute roll-angle sensor with ultra-large measuring range," Sens. Actuat. A 291, 144-149 (2019).
8.   H. Jiang, Z. Ma, H. Gu, X. Chen, and S. Liu, "Characterization of volume gratings based on distributed dielectric constant model using Mueller matrix ellipsometry," Appl. Sci. 9, 698 (2019).
9.   C. Chen, X. Chao; H. Gu, H. Jiang, C. Zhang, S. Liu, "Calibration of polarization effect of a high-numerical-aperture objective lens with Mueller matrix polarimetry," Meas. Sci. Technol. 30, 025201 (2019).
10.  Z. Yang, X. Chen, H. Jiang, and S. Liu, "In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method," Appl. Opt. 58, 4176-4184 (2019).
11.  J. Liu, J. Lin, H. Jiang, X. Chen, C. Zhang, G. Liao, and S. Liu, "Characterization of dielectric function for metallic thin films based on ellipsometric parameters and reflectivity," Phys. Scr. 94, 085802 (2019).
12.  S. Zhang, C. Chen, H. Jiang, H. Gu, X. Chen, C. Zhang, and S. Liu, "Dynamic characteristics of nematic Liquid Crystal Variable Retardere (LCVRs) investigated by a high-speed polarimetry, J. Opt. 21, 065605 (2019).
13. C. Mao, H. Li, H. Gu, J. Wang, Y. Zou, G. Qi, J. Xu, F. Deng, W. Shen, J. Li, S. Liu, J. Zhao, and L. Zhang, "Beyond the thermal equilibrium limit of ammonia synthesis with dual temperature zone catalyst powered by solar light," Chem, doi: 10.1016/j.chempr.2019.07.021 (2019).
14. J. Qu, B. Li, Y. Shen, S. Huo, Y. Xu, S. Liu, B. Song, H. Wang, C. Hu, and W. Feng, "Evaporable glass-state molecules-assisted transfer of clean and intact graphene onto arbitrary substrates," ACS Appl. Mater. Interf. 11, 16272-16279 (2019).
15. R. Xia, H. Gu, S. Liu, K. Zhang, H.-L. Yip, and Y. Cao, "Optical analysis for semitransparent organic solar cells," Sol. RRL 3, 1800270 (2019).
16. X. Liu, L. Hu, R. Wang, J. Li, H. Gu, S. Liu, Y. Zhou, and G. Tu, "Flexible perovskite solar cells via surface-confined silver nanoparticles on transparent polyimide substrates," Polymers 11, 427 (2019).
17. X. Zong, H. Wang, H. Gu, L. Ren, S. Guo, B. Tu, W. Wang, S. Liu, and Z. Fu, "Highly transparent Mg0.27Al2.58O3.73N0.27 ceramic fabricated by aqueous gelcasting, pressureless sintering and post-HIP," J. Am. Ceram. Soc. 102, 6507-6516 (2019).
18. D. Qi, X. Wang, F. Chen, H. Gu, S, Liu, and R. Gong, "Valid corollaries of polarization separated color attributes for multi-layer dielectric structure," Phys. Scr. 94, 115007 (2019).

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